Assistant Professor Parag Banerjee, who joined the Department of Mechanical Engineering & Materials Science in fall 2011, will teach a new course: "Electronic Materials Processing."
Course description: The microelectronics industry champions the cause of precision manufacturing by building chips which fuel our hunger for information and entertainment every day. In this course, we will take a detailed look at 'unit processes' that are used for building these electronic components. Topics to be covered include crystal growth and doping of wafers, oxidation and diffusion, ion implantation, deposition, etching, cleaning and lithography. First, we will invoke concepts from science and engineering to study each of these processes separately. Thereafter, the instruction will be devoted to issues of process integration, where you will learn to appreciate and finally design your own 'process flow' for building a wide variety of electronic devices such as transistors and light emitting diodes (LEDs). Where relevant, concepts in nanotechnology-based processing will be highlighted to show the extreme nature of engineering in designing increasingly tiny and faster chips.
Prerequisites: Undergraduate engineering mathematics or calculus, materials science and basic electronics or instructor's permission. 3 units.
Books: 1. Fabrication Engineering at the Micro and Nanoscale, 3rd edition, Stephen A. Campbell, Oxford University Press 2008, 2. Nanostructures and Nanomaterials – Synthesis, Properties and Applications, 2nd edition, Guozhong Cao & Ying Wang, World Scientific, 2011.